Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6500496 | Hollow cathode for plasma doping system | Ziwei Fang | 2002-12-31 |
| 6433553 | Method and apparatus for eliminating displacement current from current measurements in a plasma processing system | Charles E. Van Wagoner | 2002-08-13 |
| 6335536 | Method and apparatus for low voltage plasma doping using dual pulses | Ziwei Fang | 2002-01-01 |