Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6500496 | Hollow cathode for plasma doping system | Matthew J. Goeckner | 2002-12-31 |
| 6335536 | Method and apparatus for low voltage plasma doping using dual pulses | Matthew J. Goeckner | 2002-01-01 |