Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6476921 | In-situ method and apparatus for end point detection in chemical mechanical polishing | Jamie Nam, Hilario Oh | 2002-11-05 |
| 6458013 | Method of chemical mechanical polishing | Jiun-Yu Lai, Hilario Oh | 2002-10-01 |