Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6476921 | In-situ method and apparatus for end point detection in chemical mechanical polishing | Nannaji Saka, Jamie Nam | 2002-11-05 |
| 6458013 | Method of chemical mechanical polishing | Nannaji Saka, Jiun-Yu Lai | 2002-10-01 |
| 6418356 | Method and apparatus for resolving conflicts in a substrate processing system | — | 2002-07-09 |