Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6497982 | Method for suppressing optical proximity effect bias within a wafer | — | 2002-12-24 |
| 6465160 | Method for preventing side-lobes in photolithography | Kao-Tsair Tsai | 2002-10-15 |
| 6352896 | Method of manufacturing DRAM capacitor | Haochieh Liu, Hsi-Chuan Chen, Jung-Ho Chang, Hong-Hsiang Tsai, Sen-Huan Huang +2 more | 2002-03-05 |