Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6465160 | Method for preventing side-lobes in photolithography | Li-Ming Wang | 2002-10-15 |
| 6413685 | Method of reducing optical proximity effect | Li-Mimg Wang | 2002-07-02 |
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6465160 | Method for preventing side-lobes in photolithography | Li-Ming Wang | 2002-10-15 |
| 6413685 | Method of reducing optical proximity effect | Li-Mimg Wang | 2002-07-02 |