Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6495472 | Method for avoiding erosion of conductor structure during removing etching residues | Chan-Lon Yang | 2002-12-17 |
| 6453915 | Post polycide gate etching cleaning method | Chan-Lon Yang | 2002-09-24 |
| 6440873 | Post metal etch cleaning method | Chan-Lon Yang | 2002-08-27 |