Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6468926 | Manufacture method and system for semiconductor device with thin gate insulating film of oxynitride | Kiyoshi Irino, Ken-ichi Hikazutani, Taro Sugizaki, Satoshi Ohkubo, Toshiro Nakanishi +1 more | 2002-10-22 |
| 6376630 | Copolymer and process for producing the same | Koichi Nishimura, Toyozo Fujioka | 2002-04-23 |