Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6468926 | Manufacture method and system for semiconductor device with thin gate insulating film of oxynitride | Kiyoshi Irino, Tatsuya Kawamura, Taro Sugizaki, Satoshi Ohkubo, Toshiro Nakanishi +1 more | 2002-10-22 |