Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6411023 | Vacuum processing apparatus and ion pump capable of suppressing leakage of ions and electrons from ion pump | Ryoichi Hirano, Toru Tojo | 2002-06-25 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6411023 | Vacuum processing apparatus and ion pump capable of suppressing leakage of ions and electrons from ion pump | Ryoichi Hirano, Toru Tojo | 2002-06-25 |