Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6411023 | Vacuum processing apparatus and ion pump capable of suppressing leakage of ions and electrons from ion pump | Katsuhito Ogura, Ryoichi Hirano | 2002-06-25 |
| 6346354 | Pattern writing method | Takayuki Abe, Hirohito Anze, Susumu Oogi, Mitsuko Shimizu, Hideo Inoue +5 more | 2002-02-12 |