Issued Patents 2002
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6494768 | Wafer polishing apparatus | — | 2002-12-17 |
| 6402589 | Wafer grinder and method of detecting grinding amount | Minoru Numoto, Kenji Sakai | 2002-06-11 |
| 6354914 | Wafer polishing apparatus | Minoru Numoto, Kenji Sakai, Manabu Satoh | 2002-03-12 |
| 6346037 | Wafer polishing machine | Minoru Numoto, Kenji Sakai | 2002-02-12 |