Issued Patents 2002
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6485358 | Wafer polishing device | Shigeyuki Honma | 2002-11-26 |
| 6409583 | Apparatus for polishing wafers | — | 2002-06-25 |
| 6402589 | Wafer grinder and method of detecting grinding amount | Takao Inaba, Kenji Sakai | 2002-06-11 |
| 6354914 | Wafer polishing apparatus | Takao Inaba, Kenji Sakai, Manabu Satoh | 2002-03-12 |
| 6346037 | Wafer polishing machine | Takao Inaba, Kenji Sakai | 2002-02-12 |