Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6499933 | Elevating mechanism, carrier conveying apparatus and heat treatment installation | — | 2002-12-31 |
| 6435232 | Coolant passage connecting apparatus for a machine tool | — | 2002-08-20 |
| 6390754 | Wafer processing apparatus, method of operating the same and wafer detecting system | Kenichi Yamaga, Yuji Ono, Masahiro Miyashita | 2002-05-21 |