Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6390754 | Wafer processing apparatus, method of operating the same and wafer detecting system | Yuji Ono, Masahiro Miyashita, Osamu Tanigawa | 2002-05-21 |
| 6369361 | Thermal processing apparatus | Takanori Saito, Tsuyoshi Takizawa | 2002-04-09 |