Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6474986 | Hot plate cooling method and heat processing apparatus | Tetsuya Oda, Toshichika Takei, Eiichi Shirakawa | 2002-11-05 |
| 6450805 | Hot plate cooling method and heat processing apparatus | Tetsuya Oda, Toshichika Takei | 2002-09-17 |