Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6474986 | Hot plate cooling method and heat processing apparatus | Tetsuya Oda, Mitsuhiro Tanoue, Toshichika Takei | 2002-11-05 |
| 6450803 | Heat treatment apparatus | Nobuyuki Sata | 2002-09-17 |
| 6380518 | Heat treatment apparatus and substrate processing system | Nobuyuki Sata | 2002-04-30 |