Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6489208 | Method of forming a laminated structure to enhance metal silicide adhesion on polycrystalline silicon | Masato Koizumi, Kazuya Okubo, Tsuyoshi Takahashi, Tsuyoshi Hashimoto | 2002-12-03 |
| 6454909 | Method and apparatus for forming a film on an object to be processed | Sakae Nakatsuka, Kentaro Oshimo | 2002-09-24 |
| 6404021 | Laminated structure and a method of forming the same | Masato Koizumi, Kazuya Okubo, Tsuyoshi Takahashi, Tsuyoshi Hashimoto | 2002-06-11 |