KO

Kazuya Okubo

TL Tokyo Electron Limited: 2 patents #58 of 413Top 15%
Overall (2002): #56,200 of 266,432Top 25%
2
Patents 2002

Issued Patents 2002

Showing 1–2 of 2 patents

Patent #TitleCo-InventorsDate
6489208 Method of forming a laminated structure to enhance metal silicide adhesion on polycrystalline silicon Masato Koizumi, Tsuyoshi Takahashi, Tsuyoshi Hashimoto, Kimihiro Matsuse 2002-12-03
6404021 Laminated structure and a method of forming the same Masato Koizumi, Tsuyoshi Takahashi, Tsuyoshi Hashimoto, Kimihiro Matsuse 2002-06-11