Issued Patents 2002
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6498685 | Maskless, microlens EUV lithography system | — | 2002-12-24 |
| 6489984 | Pixel cross talk suppression in digital microprinters | — | 2002-12-03 |
| 6424404 | Multi-stage microlens array | — | 2002-07-23 |
| 6392752 | Phase-measuring microlens microscopy | — | 2002-05-21 |
| 6360643 | Blade assembly for shear | Christopher A. Zurek | 2002-03-26 |
| 6340602 | Method of measuring meso-scale structures on wafers | Fred E. Stanke | 2002-01-22 |