Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6419846 | Determining endpoint in etching processes using principal components analysis of optical emission spectra | Anthony J. Toprac, Joseph William Wiseman | 2002-07-16 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6419846 | Determining endpoint in etching processes using principal components analysis of optical emission spectra | Anthony J. Toprac, Joseph William Wiseman | 2002-07-16 |