Issued Patents 2002
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6485564 | Thin film forming method | Yijun Liu, Takashi Magara | 2002-11-26 |
| 6482266 | Metal organic chemical vapor deposition method and apparatus | Kenji Matsumoto | 2002-11-19 |
| 6467491 | Processing apparatus and processing method | Masahito Sugiura, Hideki Kiryu, Shintaro Aoyama | 2002-10-22 |
| 6428850 | Single-substrate-processing CVD method of forming film containing metal element | Yijun Liu, Masahito Sugiura | 2002-08-06 |