Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6485564 | Thin film forming method | Hiroshi Shinriki, Takashi Magara | 2002-11-26 |
| 6428850 | Single-substrate-processing CVD method of forming film containing metal element | Hiroshi Shinriki, Masahito Sugiura | 2002-08-06 |