HO

Hirofumi Ookuma

TL Tokyo Electron Limited: 1 patents #141 of 413Top 35%
Overall (2002): #205,201 of 266,432Top 80%
1
Patents 2002

Issued Patents 2002

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
6383948 Coating film forming apparatus and coating film forming method Takahiro Kitano, Masateru Morikawa, Yukihiko Esaki, Nobukazu Ishizaka, Norihisa Koga +2 more 2002-05-07