Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6481285 | Micro-machined angle-measuring gyroscope | Andrei M. Shkel | 2002-11-19 |
| 6478974 | Microfabricated filter and shell constructed with a permeable membrane | Kyle S. Lebouitz, Albert P. Pisano | 2002-11-12 |
| 6448622 | Polycrystalline silicon-germanium films for micro-electromechanical systems application | Andrea Franke, Tsu-Jae King | 2002-09-10 |