Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6448622 | Polycrystalline silicon-germanium films for micro-electromechanical systems application | Roger T. Howe, Tsu-Jae King | 2002-09-10 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6448622 | Polycrystalline silicon-germanium films for micro-electromechanical systems application | Roger T. Howe, Tsu-Jae King | 2002-09-10 |