Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6486480 | Plasma formed ion beam projection lithography system | Yung-Hee Yvette Lee, Vinh X. Ngo, Nastaran Zahir | 2002-11-26 |
| 6376978 | Quartz antenna with hollow conductor | Elie Benabou | 2002-04-23 |