Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6486480 | Plasma formed ion beam projection lithography system | Ka-Ngo Leung, Yung-Hee Yvette Lee, Nastaran Zahir | 2002-11-26 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6486480 | Plasma formed ion beam projection lithography system | Ka-Ngo Leung, Yung-Hee Yvette Lee, Nastaran Zahir | 2002-11-26 |