Issued Patents 2002
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6461955 | Yield improvement of dual damascene fabrication through oxide filling | Robert Tsu, William R. McKee | 2002-10-08 |
| 6372566 | Method of forming a silicide layer using metallic impurities and pre-amorphization | Jorge A. Kittl | 2002-04-16 |
| 6358849 | Integrated circuit interconnect and method | Robert H. Havemann, Girish Dixit, Manoj Kumar Jain, Eden Zielinski, Jeffrey Alan West | 2002-03-19 |
| 6355559 | Passivation of inlaid metallization | Robert H. Havemann, Girish Dixit | 2002-03-12 |