Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6497055 | System and method for controlling a vapor dryer process | Claire Ching-Shan Jung, Daryl Ross Koehl, Donald Rigsby | 2002-12-24 |
| 6399513 | Ozonated DI water process for organic residue and metal removal processes | Claire Ching-Shan Jung, Danny F. Mathews | 2002-06-04 |
| 6387822 | Application of an ozonated DI water spray to resist residue removal processes | Claire Ching-Shan Jung, Danny F. Mathews | 2002-05-14 |