Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6399513 | Ozonated DI water process for organic residue and metal removal processes | Neal Murphy, Claire Ching-Shan Jung | 2002-06-04 |
| 6387822 | Application of an ozonated DI water spray to resist residue removal processes | Neal Murphy, Claire Ching-Shan Jung | 2002-05-14 |