Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6479100 | CVD ruthenium seed for CVD ruthenium deposition | Xiaoliang Jin, Xianzhi Tao, Elaine Pao, Yaxin Wang, Jun Zhao | 2002-11-12 |
| 6440495 | Chemical vapor deposition of ruthenium films for metal electrode applications | Elaine Pao, Yaxin Wang, Jun Zhao | 2002-08-27 |