Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6423175 | Apparatus and method for reducing particle contamination in an etcher | Cherng-Chang Tsuei, I Chang Wu | 2002-07-23 |
YH
Yu-Chih Huang
Overall (2002): #84,086 of 266,432Top 35%
1
Patents 2002