Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6423175 | Apparatus and method for reducing particle contamination in an etcher | Yu-Chih Huang, I Chang Wu | 2002-07-23 |
CT
Cherng-Chang Tsuei
Overall (2002): #239,902 of 266,432Top 95%
1
Patents 2002