Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6485869 | Photomask frame modification to eliminate process induced critical dimension control variation | Marilyn Kamna, Frederick Chen, Jeff Farnsworth | 2002-11-26 |
| 6458495 | Transmission and phase balance for phase-shifting mask | Qi-De Qian | 2002-10-01 |