Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6396567 | Method and apparatus for controlling the dose of radiations applied to a semiconductor wafer during photolithography | I-Chung Chang, Kun-Pi Cheng | 2002-05-28 |
| 6346366 | Method for making an advanced guard ring for stacked film using a novel mask design | Yi-Tung Yen, Chai-Der Chang | 2002-02-12 |