Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6396567 | Method and apparatus for controlling the dose of radiations applied to a semiconductor wafer during photolithography | Tsu-Yu Chu, I-Chung Chang | 2002-05-28 |
| 6357131 | Overlay reliability monitor | I-Chung Chang | 2002-03-19 |