Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6465044 | Chemical vapor deposition of silicon oxide films using alkylsiloxane oligomers with ozone | Zheng Yuan | 2002-10-15 |
| 6417092 | Low dielectric constant etch stop films | Somnath Nag, Gerrit J Kooi, M. Ziaul Karim, Kenneth P. MacWilliams | 2002-07-09 |