Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6436488 | Chemical vapor deposition method for amorphous silicon and resulting film | Jeremy Alfred Theil, Ron Varghese | 2002-08-20 |
| 6417092 | Low dielectric constant etch stop films | Sanjeev Kumar Jain, Somnath Nag, M. Ziaul Karim, Kenneth P. MacWilliams | 2002-07-09 |