Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6350390 | Plasma etch method for forming patterned layer with enhanced critical dimension (CD) control | Chi Kang Liu, Chang-Jen Shieh | 2002-02-26 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6350390 | Plasma etch method for forming patterned layer with enhanced critical dimension (CD) control | Chi Kang Liu, Chang-Jen Shieh | 2002-02-26 |