PC

Pei-Hung Chen

TSMC: 1 patents #199 of 614Top 35%
📍 Baoshan, CA: #6 of 17 inventorsTop 40%
Overall (2002): #140,410 of 266,432Top 55%
1
Patents 2002

Issued Patents 2002

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
6350390 Plasma etch method for forming patterned layer with enhanced critical dimension (CD) control Chi Kang Liu, Chang-Jen Shieh 2002-02-26