Issued Patents 2002
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6489684 | Reduction of electromigration in dual damascene connector | Sheng-Hsiung Chen, Tsu Shi | 2002-12-03 |
| 6479389 | Method of doping copper metallization | Sheng Hsiang Chen | 2002-11-12 |
| 6420258 | Selective growth of copper for advanced metallization | Sheng-Hsiung Chen | 2002-07-16 |
| 6406956 | Poly resistor structure for damascene metal gate | Chii-Ming Wu | 2002-06-18 |
| 6399486 | Method of improved copper gap fill | Sheng-Hsiung Chen | 2002-06-04 |