Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6500274 | Apparatus and method for wet cleaning wafers without ammonia vapor damage | Jih-Churng Twu, Chia-Chun Cheng | 2002-12-31 |
| 6425191 | Apparatus and method for reducing solvent residue in a solvent-type dryer for semiconductor wafers | Rong-Hui Kao, Jih-Churng Twu, Tsung-Chieh Tsai, Chia-Chun Cheng | 2002-07-30 |
| 6405452 | Method and apparatus for drying wafers after wet bench | Jih-Churng Twu, Yu-Chien Hsiao, Chia-Chun Cheng | 2002-06-18 |