Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6350662 | Method to reduce defects in shallow trench isolations by post liner anneal | Kong-Beng Thei, Dun-Nian Yaung, Shou-Gwo Wuu | 2002-02-26 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6350662 | Method to reduce defects in shallow trench isolations by post liner anneal | Kong-Beng Thei, Dun-Nian Yaung, Shou-Gwo Wuu | 2002-02-26 |