Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6472721 | Dual damascene interconnect structures that include radio frequency capacitors and inductors | Ssu-Pin Ma, Chun-Hon Chen, Ta-Hsun Yeh, Kuo-Reay Peng, Heng-Ming Hsu +2 more | 2002-10-29 |
| 6350662 | Method to reduce defects in shallow trench isolations by post liner anneal | Kuei-Ying Lee, Dun-Nian Yaung, Shou-Gwo Wuu | 2002-02-26 |
| 6335249 | Salicide field effect transistors with improved borderless contact structures and a method of fabrication | Ming-Ta Lei, Shou-Gwo Wuu | 2002-01-01 |