Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6495469 | High selectivity, low etch depth micro-loading process for non stop layer damascene etch | Li-Te Lin, Li-Chih Chao | 2002-12-17 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6495469 | High selectivity, low etch depth micro-loading process for non stop layer damascene etch | Li-Te Lin, Li-Chih Chao | 2002-12-17 |