Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6435865 | Apparatus and method for positioning gas injectors in a vertical furnace | Heng-Yi Tseng | 2002-08-20 |
| 6340933 | Semiconductor wafer transport pod having cover latch indicator | Yi-Jen Chen | 2002-01-22 |