Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6435865 | Apparatus and method for positioning gas injectors in a vertical furnace | Guey-Shyung Cho | 2002-08-20 |
| 6341935 | Wafer boat having improved wafer holding capability | — | 2002-01-29 |