Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6500725 | Microelectronic fabrication method providing alignment mark and isolation trench of identical depth | Chien-Chuan Chen, Bin Su, Shu-Huei Suen | 2002-12-31 |
| 6429142 | In-situ photoresist removal by an attachable chamber with light source | Dian-Hau Chen | 2002-08-06 |