Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6423640 | Headless CMP process for oxide planarization | Tze-Liang Lee, Fan Yang | 2002-07-23 |
CY
Chen-Hwa Yu
Overall (2002): #239,315 of 266,432Top 90%
1
Patents 2002