Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6477787 | Method and apparatus for heating and cooling substrates | Ho Seon Shin, Robin Cheung, Igor Kogan | 2002-11-12 |
| 6357143 | Method and apparatus for heating and cooling substrates | Ho Seon Shin, Robin Cheung, Igor Kogan | 2002-03-19 |